Both continuous reciprocating vacuum coating apparatus

基本信息

申请号 JP2019051709 申请日 -
公开(公告)号 JP2020094267A 公开(公告)日 2020-06-18
申请公布号 JP2020094267A 申请公布日 2020-06-18
分类号 C23C14/56;C23C14/14;B05C9/04;B05C9/10 分类 对金属材料的镀覆;用金属材料对材料的镀覆;表面化学处理;金属材料的扩散处理;真空蒸发法、溅射法、离子注入法或化学气相沉积法的一般镀覆;金属材料腐蚀或积垢的一般抑制〔2〕;
发明人 厳佐毅;劉文卿 申请(专利权)人 深圳金美新材料科技有限公司
代理机构 TRY国際特許業務法人 代理人 安徽金美新材料科技有限公司
地址 -
法律状态 -

摘要

摘要 [A] providing a continuous reciprocating vacuum coating on both sides. The present invention continuously reciprocating vacuum coating apparatus includes both a vacuum space [a], in the vacuum space, the upper [rikoira[rikoira] mechanism, the driving mechanism upward, downward and the lower driving mechanism mounted [rikoira[rikoira] mechanism. The upper and lower driving mechanism respectively upward and downward drive mechanism underlying [rikoira[rikoira] mechanism [rikoira[rikoira] mechanism, waiting for a coating material film, or an upper or lower [rikoira[rikoira] supplied from the mechanism, the driving mechanism is upward or downward, a downward or upward after passing through the driving mechanism, a lower or upper [rikoira[rikoira] return mechanism. The drive mechanism and the drive mechanism of the coating material film at a position corresponding to the upward coating apparatus is waiting for a downward one by one is attached 1. The present invention, two vertical mounting apparatus 2 by two vertical [rikoira[rikoira] mechanism 2, the vacuum space is continuously reciprocated in the coating, the process efficiency can be greatly improved. Figure 1 [drawing]